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<p>In this paper, two distinct types of planar mode tri-metallic hybrid nanostructure gas sensors utilizing porous silicon (PS), gold nanoparticles (Au NPs), and tungsten oxide nanoparticles (WO<sub>3</sub> NPs) were fabricated and tested extensively. N-type Si wafers with (100) orientation have been used in fabricating PS layers by laser-assisted electrochemical etching. Both Au NPs and WO<sub>3</sub> NPs were deposited on the PS layer through the reduction of HAuCl<sub>4</sub> and H<sub>2</sub>WO<sub>4</sub> ions by the dangling bonds of the PS layer to synthesize WO<sub>3</sub> NPs/PS and WO<sub>3</sub> NPs/Au NPs/PS hybrid nanostructure gas sensors. The fabricated gas sensors were successfully examined to detect different NO<sub>2</sub> gas concentrations ranging from 10 to 40&#xa0;ppm at room temperature. The sensitivity and temporal response of the fabricated sensors exhibit a strong dependence on the specific surface area (S.S.A.) as well as the thermal conductivity of the Au NPs. The sensitivity of the sensors increased with a higher S.S.A. For the WO<sub>3</sub> NPs/PS and WO<sub>3</sub> NPs/Au NPs/PS sensors, the S.S.A. is about 33.18 m<sup>2</sup>/g and 89.96 m<sup>2</sup>/g, respectively. At a gas concentration of 40&#xa0;ppm, the sensitivity of the WO<sub>3</sub> NPs/PS sensor was about 32%. In contrast, for the WO<sub>3</sub> NPs/PS/Au NPs gas sensors, the sensitivity increased to 88%. The temporal response (response Rst and recovery times Rct) was decreased by 18% and 175%, after incorporating Au NPs into WO<sub>3</sub> NPs/PS. The stability of the WO<sub>3</sub> NPs/Au NPs/PS gas sensor is much better than that of the WO<sub>3</sub> NPs/PS gas sensor, where the decay rates are about 0.02%/day and 1.11%/day, respectively. This improvement can be ascribed to the thermal conductivity of Au NPs and their augmented surface area on the PS layer and WO<sub>3</sub>. The produced tri-type hybrid nanostructures are inexpensive, easy to use, and ideal gas-sensing substrates.</p>

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High-performance NO2 gas detection using WO3-based hybrid nanostructures

  • 期刊论文

  • 发表日期：

    2026年4月13日

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  • Abeer Ghalib Hadi,
  • Alwan M. Alwan,
  • Ali A. Yousif

摘要

In this paper, two distinct types of planar mode tri-metallic hybrid nanostructure gas sensors utilizing porous silicon (PS), gold nanoparticles (Au NPs), and tungsten oxide nanoparticles (WO3 NPs) were fabricated and tested extensively. N-type Si wafers with (100) orientation have been used in fabricating PS layers by laser-assisted electrochemical etching. Both Au NPs and WO3 NPs were deposited on the PS layer through the reduction of HAuCl4 and H2WO4 ions by the dangling bonds of the PS layer to synthesize WO3 NPs/PS and WO3 NPs/Au NPs/PS hybrid nanostructure gas sensors. The fabricated gas sensors were successfully examined to detect different NO2 gas concentrations ranging from 10 to 40 ppm at room temperature. The sensitivity and temporal response of the fabricated sensors exhibit a strong dependence on the specific surface area (S.S.A.) as well as the thermal conductivity of the Au NPs. The sensitivity of the sensors increased with a higher S.S.A. For the WO3 NPs/PS and WO3 NPs/Au NPs/PS sensors, the S.S.A. is about 33.18 m2/g and 89.96 m2/g, respectively. At a gas concentration of 40 ppm, the sensitivity of the WO3 NPs/PS sensor was about 32%. In contrast, for the WO3 NPs/PS/Au NPs gas sensors, the sensitivity increased to 88%. The temporal response (response Rst and recovery times Rct) was decreased by 18% and 175%, after incorporating Au NPs into WO3 NPs/PS. The stability of the WO3 NPs/Au NPs/PS gas sensor is much better than that of the WO3 NPs/PS gas sensor, where the decay rates are about 0.02%/day and 1.11%/day, respectively. This improvement can be ascribed to the thermal conductivity of Au NPs and their augmented surface area on the PS layer and WO3. The produced tri-type hybrid nanostructures are inexpensive, easy to use, and ideal gas-sensing substrates.