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<p>ZnO is a versatile choice in sensor design, but its selectivity is insufficient in mixed gas environments. This situation can be improved by growing a ZIF-8 membrane on the surface of ZnO, but limited by the synthesis procedure of ZnO@ZIF-8 composite. In this work, the surface-patterned ZnO@ZIF-8 gas sensor is prepared. First, the ZnO substrate is prepared via the self-developed sol–gel synthesis method. Then, the surface of ZnO substrate is patterned via inductively coupled plasma etching technique. Next, the ZIF-8 membrane is converted from the outer surface of ZnO via chemical vapor deposition (CVD) technique. The formation of the ZnO@ZIF-8 composite film is verified with FTIR, XRD, and SEM experiments, where the patterned ZnO@ZIF-8 film exhibits favorable crystalline properties and surface structure. Also, the responsivities of surface-patterned ZnO@ZIF-8 film to H<sub>2</sub> and CO are measured and compared with those of pure ZnO, patterned ZnO and unpatterned ZnO@ZIF-8 films. The measured results show that, compared to pure ZnO cases, the patterned ZnO@ZIF-8 film exhibits very considerable selectivity toward specific gas (H<sub>2</sub>). Especially, compared to unpatterned ZnO@ZIF-8, the responsivities of patterned ZnO@ZIF-8 to H<sub>2</sub> at 200&#xa0;°C increase from ~ 40 to ~ 75%, while in the case of CO from 2 to 5%. The proposed strategy is feasibly applicable to prepare gas sensors with good responsivity and improved selectivity in mixed gas environments.</p>

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Surface-patterned and CVD-synthesized ZnO@ZIF-8 resistive gas sensor with enhanced selectivity and response to H2

  • 期刊论文

  • 发表日期：

    2026年4月3日

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  • Jin Wang,
  • Jinpeng Wu,
  • Min Deng,
  • Yifei He,
  • Yunqing Lu

摘要

ZnO is a versatile choice in sensor design, but its selectivity is insufficient in mixed gas environments. This situation can be improved by growing a ZIF-8 membrane on the surface of ZnO, but limited by the synthesis procedure of ZnO@ZIF-8 composite. In this work, the surface-patterned ZnO@ZIF-8 gas sensor is prepared. First, the ZnO substrate is prepared via the self-developed sol–gel synthesis method. Then, the surface of ZnO substrate is patterned via inductively coupled plasma etching technique. Next, the ZIF-8 membrane is converted from the outer surface of ZnO via chemical vapor deposition (CVD) technique. The formation of the ZnO@ZIF-8 composite film is verified with FTIR, XRD, and SEM experiments, where the patterned ZnO@ZIF-8 film exhibits favorable crystalline properties and surface structure. Also, the responsivities of surface-patterned ZnO@ZIF-8 film to H2 and CO are measured and compared with those of pure ZnO, patterned ZnO and unpatterned ZnO@ZIF-8 films. The measured results show that, compared to pure ZnO cases, the patterned ZnO@ZIF-8 film exhibits very considerable selectivity toward specific gas (H2). Especially, compared to unpatterned ZnO@ZIF-8, the responsivities of patterned ZnO@ZIF-8 to H2 at 200 °C increase from ~ 40 to ~ 75%, while in the case of CO from 2 to 5%. The proposed strategy is feasibly applicable to prepare gas sensors with good responsivity and improved selectivity in mixed gas environments.