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<p>As the transition to clean energy accelerates, hydrogen (H<sub>2</sub>) has attracted significant attention due to its clean and efficient properties. Rapid detection of H<sub>2</sub> leaks is crucial for the safe and widespread adoption of H<sub>2</sub> energy in the energy sector. In this study, a high-performance, long-term stable room-temperature resistive microelectromechanical systems (MEMS) H<sub>2</sub> gas sensor was fabricated by exploiting microstructural changes in palladium nanofilms(Pd NFs) induced by varying annealing temperatures. The surface morphology and microstructural evolution under different annealing conditions were systematically characterized using atomic force microscopy (AFM) and scanning electron microscopy (SEM). The sensing mechanisms of the Pd NFs annealed at various annealing temperatures were systematically analyzed with a focus on microstructural morphology. The results showed that the microstructure induced by annealing at 300&#xa0;°C effectively reduced the response time of the H<sub>2</sub> sensor to low-concentration gases and improved long-term performance. Furthermore, the sensor achieved a detection limit as low as 20&#xa0;ppm. The sensor’s response time for H<sub>2</sub> at a concentration of 20&#xa0;ppm was 16&#xa0;s, which was reduced to 10&#xa0;s at 40&#xa0;°C. After continuous operation for 50&#xa0;days, the sensor maintained stable responsiveness to H<sub>2</sub>. When exposed to 2% of H<sub>2</sub>, the Pd NFs annealed at 300&#xa0;°C exhibited a 63.46% higher response compared to the unannealed Pd NFs. These findings provide an effective strategy for effectively optimizing the sensing performance of Pd NFs based H2 sensors.</p>

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Optimizing the performance of room-temperature hydrogen sensors based on palladium nanofilms by regulating grain morphology through annealing temperature

  • 期刊论文

  • 发表日期：

    2026年3月2日

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  • Jiang Shao,
  • Changkun Zhu,
  • Wei Wang,
  • Tongbin Chen,
  • Xin Zhang,
  • Qinghui Jin,
  • Jiawen Jian,
  • Jie Zou

摘要

As the transition to clean energy accelerates, hydrogen (H2) has attracted significant attention due to its clean and efficient properties. Rapid detection of H2 leaks is crucial for the safe and widespread adoption of H2 energy in the energy sector. In this study, a high-performance, long-term stable room-temperature resistive microelectromechanical systems (MEMS) H2 gas sensor was fabricated by exploiting microstructural changes in palladium nanofilms(Pd NFs) induced by varying annealing temperatures. The surface morphology and microstructural evolution under different annealing conditions were systematically characterized using atomic force microscopy (AFM) and scanning electron microscopy (SEM). The sensing mechanisms of the Pd NFs annealed at various annealing temperatures were systematically analyzed with a focus on microstructural morphology. The results showed that the microstructure induced by annealing at 300 °C effectively reduced the response time of the H2 sensor to low-concentration gases and improved long-term performance. Furthermore, the sensor achieved a detection limit as low as 20 ppm. The sensor’s response time for H2 at a concentration of 20 ppm was 16 s, which was reduced to 10 s at 40 °C. After continuous operation for 50 days, the sensor maintained stable responsiveness to H2. When exposed to 2% of H2, the Pd NFs annealed at 300 °C exhibited a 63.46% higher response compared to the unannealed Pd NFs. These findings provide an effective strategy for effectively optimizing the sensing performance of Pd NFs based H2 sensors.