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<p>A series of novel glass–ceramic/ceramic composites, composed of a low softening ZnO–B<sub>2</sub>O<sub>3</sub>–SiO<sub>2</sub> (ZBS) glass–ceramic and SiO<sub>2</sub>/ZrO<sub>2</sub> ceramics, were fabricated for low temperature co-fired ceramic (LTCC) applications. The effects of the ZrO<sub>2</sub>/SiO<sub>2</sub> mass ratio on sintering behavior, microstructure, crystallization behavior and resultant properties of the ZBS/SiO<sub>2</sub>/ZrO<sub>2</sub> (ZSZ) composites were systematically investigated. The results indicate that the major crystalline phase Zn<sub>2</sub>SiO<sub>4</sub> remained stable with increasing ZrO<sub>2</sub>/SiO<sub>2</sub> mass ratio, while a minor ZrSiO<sub>4</sub> phase precipitated. Variations in the Zn<sub>2</sub>SiO<sub>4</sub>/ZrSiO<sub>4</sub> phase content resulted in an increase in the coefficient of thermal expansion (CTE) value from 2.75 × 10<sup>–6</sup>/K to 3.81 × 10<sup>–6</sup>/K, alongside a rise in flexural strength from 120.8&#xa0;MPa to 152.3&#xa0;MPa. The optimal properties were achieved in the ZSZ composite with a ZrO<sub>2</sub>/SiO<sub>2</sub> mass ratio = 4:5, sintered at 900 °C for 30&#xa0;min: <InlineEquation ID="IEq1"> <EquationSource Format="TEX">\({\varepsilon }_{r}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>ε</mi> <mi>r</mi> </msub> </math></EquationSource> </InlineEquation>=&#xa0;5.52, tan<i>δ</i> = 6.92 × 10<sup>–4</sup>, CTE = 3.81 × 10<sup>–6</sup>/K, flexural strength (152.3&#xa0;MPa) and excellent compatibility with Ag electrodes.</p>

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Effects of ZrO2 on phase evolution, microstructure and properties of ZBS/SiO2 composites for LTCC applications

  • 期刊论文

  • 发表日期：

    2026年2月22日

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  • Yating Wang,
  • Yunchen Pan,
  • Jiajun Wu,
  • Jianxi Tong,
  • Qilong Zhang

摘要

A series of novel glass–ceramic/ceramic composites, composed of a low softening ZnO–B2O3–SiO2 (ZBS) glass–ceramic and SiO2/ZrO2 ceramics, were fabricated for low temperature co-fired ceramic (LTCC) applications. The effects of the ZrO2/SiO2 mass ratio on sintering behavior, microstructure, crystallization behavior and resultant properties of the ZBS/SiO2/ZrO2 (ZSZ) composites were systematically investigated. The results indicate that the major crystalline phase Zn2SiO4 remained stable with increasing ZrO2/SiO2 mass ratio, while a minor ZrSiO4 phase precipitated. Variations in the Zn2SiO4/ZrSiO4 phase content resulted in an increase in the coefficient of thermal expansion (CTE) value from 2.75 × 10–6/K to 3.81 × 10–6/K, alongside a rise in flexural strength from 120.8 MPa to 152.3 MPa. The optimal properties were achieved in the ZSZ composite with a ZrO2/SiO2 mass ratio = 4:5, sintered at 900 °C for 30 min: \({\varepsilon }_{r}\) ε r = 5.52, tanδ = 6.92 × 10–4, CTE = 3.81 × 10–6/K, flexural strength (152.3 MPa) and excellent compatibility with Ag electrodes.