Synthesis, characterization and humidity sensing properties of TiO2 nanoparticles for environmental and smart device applications
摘要
TiO2 nanoparticles were synthesized via a sol–gel method and systematically investigated for their structural, optical, and humidity sensing properties for environmental and smart device applications. X-ray diffraction confirmed a mixed anatase–rutile phase with high crystallinity and an average crystallite size of 7.93 nm, while Raman spectroscopy indicated the dominance of the rutile phase after annealing at 700 °C. FESEM analysis revealed a dense polycrystalline morphology with grain sizes in the micrometer and sub-micrometer range, and EDS confirmed elemental purity. UV–visible spectroscopy showed strong ultraviolet absorption with indirect and direct optical band gaps of 2.96 and 3.34 eV, respectively. The TiO2-based humidity sensor exhibited a pronounced resistance decrease from ~ 1000 KΩ at 20% RH to ~ 150 KΩ at 90% RH at room temperature, demonstrating high sensitivity and a wide dynamic range. The sensing mechanism is governed by chemisorption at low humidity and proton-assisted ionic conduction at higher humidity levels. The sensor showed fast response–recovery behavior, low hysteresis, excellent repeatability, and stable performance with a response of ~ 77–78% maintained over 15 days at 60% RH. These results demonstrate that sol–gel-derived TiO2 nanoparticles are promising candidates for reliable, low-cost, and room-temperature humidity sensing applications.