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<p>The improvement of light extraction efficiency (LEE) is essential for the commercial viability of Micro-LED technology, which is characterized by its high brightness and low power consumption. However, the total internal reflection (TIR) phenomenon results in considerable external light loss. To address this issue, surface roughened microlens arrays (SRMLAs) were designed and implemented on the emission surface of Micro-LEDs to enhance light outcoupling efficiency. The results indicate that SRMLAs effectively improve both LEE and the angular uniformity of light distribution. The LEE was found to be dependent on the diameter, duty cycle, and surface roughness of the SRMLAs. A new fabrication approach combining photoresist thermal reflow and reactive ion etching (RIE) was developed to realize the SRMLAs. Experimental data revealed that Micro-LEDs integrated with SRMLAs (with a diameter of 16&#xa0;μm, a duty cycle of 1, and a surface roughness of approximately 36&#xa0;nm) achieved an external quantum efficiency (EQE) of up to 19.76%, marking a 35% enhancement compared to conventional Micro-LEDs. Moreover, the SRMLA-integrated devices demonstrated improved lateral light emission across a broader viewing angle.</p>

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Enhancement of light extraction efficiency in micro-LEDs through surface roughened microlens arrays

  • 期刊论文

  • 发表日期：

    2025年12月23日

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  • Wenfu Huang,
  • Jinyu Ye,
  • Jiawei Zhang,
  • Yibin Lin,
  • Jingyu Liu,
  • Zhenyou Zou,
  • Chaoxing Wu,
  • Yongai Zhang,
  • Jie Sun,
  • Qun Yan,
  • Xiongtu Zhou

摘要

The improvement of light extraction efficiency (LEE) is essential for the commercial viability of Micro-LED technology, which is characterized by its high brightness and low power consumption. However, the total internal reflection (TIR) phenomenon results in considerable external light loss. To address this issue, surface roughened microlens arrays (SRMLAs) were designed and implemented on the emission surface of Micro-LEDs to enhance light outcoupling efficiency. The results indicate that SRMLAs effectively improve both LEE and the angular uniformity of light distribution. The LEE was found to be dependent on the diameter, duty cycle, and surface roughness of the SRMLAs. A new fabrication approach combining photoresist thermal reflow and reactive ion etching (RIE) was developed to realize the SRMLAs. Experimental data revealed that Micro-LEDs integrated with SRMLAs (with a diameter of 16 μm, a duty cycle of 1, and a surface roughness of approximately 36 nm) achieved an external quantum efficiency (EQE) of up to 19.76%, marking a 35% enhancement compared to conventional Micro-LEDs. Moreover, the SRMLA-integrated devices demonstrated improved lateral light emission across a broader viewing angle.