Influence of the process parameters on phase stabilisation and microstructure control of TiO2 thin films for optoelectronic application
摘要
TiO2, when combined with visible light-absorbing materials has a broad potential for optoelectronic applications. TiO2 shows excellent chemical stability and is suitable as an electron transport layer (ETL) for electron extraction in photovoltaics and photodetectors. Here we report a simple solution-processing route for preparing an anatase TiO2. We explored the utility of Taguchi’s L9 orthogonal method to optimise anatase TiO2 films with smooth surfaces, polycrystalline microstructure, and transmittance above 80% in the visible region. Moreover, Taguchi and Analysis of Variance (ANOVA) methods were employed to predict the contribution of physical parameters in tailoring the fundamental structural and optical properties of anatase TiO2. The physical parameters chosen to undertake this study are – evaporation temperatures, evaporation duration, spin coating speed, and number of layers. This study offers guidelines for developing high-performance TiO2 films for application in optoelectronics. In this direction, we demonstrated the photodetection of the best sample in the UV region.