This study explores the humidity sensing of silicon nanowires (SiNWs) base materials, modified with attached nanoparticles. Three different sample types were prepared, with: (a) titanium dioxide (TiO \(_2\) ) nanoparticles, (b) tungsten trioxide (WO \(_3\) ) nanoparticles, and (c) carbon nanotubes (CNTs). Scanning electron microscopy (SEM) images revealed that the nanowires were randomly aligned in bundles, with an average length of approximately 6.5 \(\upmu\) m. Top-view SEM images further displayed nanoparticle agglomerations and coagulated CNTs on specific surface areas, with the remainder embedded within nanopores. Resistance variations across these structures were measured as relative humidity levels were adjusted from 50 to 85%. The addition of metal oxide nanoparticles and CNTs improved sensitivity by several orders of magnitude over bare SiNWs. Among the tested samples, WO \(_3\) -coated SiNWs demonstrated the lowest baseline resistance drift and highest sensitivity. When benchmarked against recent humidity sensors, these sensors showed comparable or superior performance, especially in configurations with similar structures. These findings suggest an effective, low-cost, and easy-to-fabricate approach for developing practical humidity sensors suitable for environmental monitoring and industrial applications.
