Development and characterization of low-cost porous silicon layer-based capacitive sensors for ultra-low atrazine herbicide detection
摘要
Low cost, high sensitivity, and low power consumption PS layer-based herbicide electrical sensors with and without integrated silver nanoparticles were made and investigated extensively. A laser-supported etching process was used to provide the bare macro-PS layer with specific pore dimensions. The heterostructure AgNps/PS capacitive electrical sensor was fabricated by following a simple and cost-effective immersion pathway in AgNO3 solution. Two types of capacitive electrical sensors, with a bare PS layer (Al/PS/Si/Al) and a heterostructure of (Al/AgNps/PS/Si/Al), were prepared and examined under different, but lower than acceptable daily intake (ADI) atrazine herbicide concentration. The achieved results of the parallel-mode resonance RLC circuit showed the sensors’ performance was well affected by the deposition of Ag nanoparticles and the specific surface area (SSA) of AgNps. Sensitivity rise, detection limit, and stability of the heterostructure sensor were compared with the bare PS layer sensor. Higher integrated SSA and the way AgNps were deposited on pore boundaries were responsible for these well-obtained features.