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<p>In this work, we systematically investigate the influence of substrate temperature on the structural growth, optical, and photoresponse properties of magnetron sputtered ZnO:Al (AZO) films onto glass and flexible polyethylene terephthalate (PET) substrates. A temperature-dependent transition in the preferred crystallographic orientation from (100) to (002) planes was observed, indicative of enhanced vertical alignment of ZnO crystallites. Atomic force microscopy (AFM) and corresponding fast Fourier transform (FFT) analyses revealed more uniform surface morphology and isotropic grain distribution in glass-based films, while PET substrates produced less ordered microstructures due to constrained adatom mobility during growth. The optical band gap with substrate temperature for both substrates show increased values (3.42–3.69&#xa0;eV). AZO films deposited on PET substrate shows lower refractive index, higher band gap and high Urbach energy as compared to film deposited on glass. Photodetectors fabricated with AZO films on glass exhibited shorter rise and decay times (28&#xa0;ms and 37&#xa0;ms, respectively), whereas PET-based Photodetector showed slower response (38&#xa0;ms and 62&#xa0;ms), attributed to increased disorder and carrier trapping at the polymer interface. These results offer critical insights into the processing–structure–property relationships of AZO films on flexible versus rigid substrates, highlighting viable pathways for optimizing performance in mechanically compliant optoelectronic systems.</p>

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Growth, structural and optical properties of low temperature magnetron sputtered ZnO:Al films for flexible photodetector

  • 期刊论文

  • 发表日期：

    2025年8月11日

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  • Surendra Kumar,
  • Chandra Bhal Singh,
  • Narendra Kumar Verma

摘要

In this work, we systematically investigate the influence of substrate temperature on the structural growth, optical, and photoresponse properties of magnetron sputtered ZnO:Al (AZO) films onto glass and flexible polyethylene terephthalate (PET) substrates. A temperature-dependent transition in the preferred crystallographic orientation from (100) to (002) planes was observed, indicative of enhanced vertical alignment of ZnO crystallites. Atomic force microscopy (AFM) and corresponding fast Fourier transform (FFT) analyses revealed more uniform surface morphology and isotropic grain distribution in glass-based films, while PET substrates produced less ordered microstructures due to constrained adatom mobility during growth. The optical band gap with substrate temperature for both substrates show increased values (3.42–3.69 eV). AZO films deposited on PET substrate shows lower refractive index, higher band gap and high Urbach energy as compared to film deposited on glass. Photodetectors fabricated with AZO films on glass exhibited shorter rise and decay times (28 ms and 37 ms, respectively), whereas PET-based Photodetector showed slower response (38 ms and 62 ms), attributed to increased disorder and carrier trapping at the polymer interface. These results offer critical insights into the processing–structure–property relationships of AZO films on flexible versus rigid substrates, highlighting viable pathways for optimizing performance in mechanically compliant optoelectronic systems.