Effect of lattice mismatch on orientation of MBE grown CdTe on GaAs(211)
摘要
This paper presents the Molecular Beam Epitaxial (MBE) growth of high-quality CdTe on GaAs (211) oriented substrates. The interface strain due to large lattice mismatch between CdTe epitaxial layers grown directly on GaAs substrates resulted in (133) orientation, as was observed using HRXRD and TEM imaging. Thin ZnTe layers nucleated at Low-Temperature (LT) reduce the lattice mismatch from ~ 14.6 to 6.2% and thus preserve the CdTe homo-orientation. The annealing of the LT nucleated ZnTe layer annihilates and coalesces the defects and reduces the misfit defect density at the interface. Subsequent thick CdTe epitaxial growth was carried out at a temperature of 290 °C. The crystal quality of the grown layers was studied using HRXRD FWHM.