<p>Calcium (Ca<sup>2+</sup>)-doped BZT thin films, Ba<sub>1-x</sub>Ca<sub>x</sub> Zr<sub>0.2</sub>Ti<sub>0.8</sub>O<sub>3</sub> (<i>x</i> = 0, 0.05, 0.1, 0.15 and 0.2), were synthesized on the Pt/Ti/SiO<sub>2</sub>/Si substrates via sol–gel spin-coating techniques for pulse capacitor applications. The microstructures, ferroelectric properties and energy storage performance of Ba<sub>1-x</sub>Ca<sub>x</sub>Zr<sub>0.2</sub>Ti<sub>0.8</sub>O<sub>3</sub> thin films were characterized while adjusting the Ca<sup>2+</sup> concentration. It is found that the Ca<sup>2+</sup>-doped BZT thin films exhibit single-phase perovskite structure. On increasing the Ca<sup>2+</sup> concentration, the cell volume and tolerance factor declined due to the replacement of Ca<sup>2+</sup> ions for the A-site ions in the BZT lattice. The average grain size and root-mean-square (RMS) roughness of Ba<sub>1-x</sub>Ca<sub>x</sub> Zr<sub>0.2</sub>Ti<sub>0.8</sub>O<sub>3</sub> thin films with dense and uniform microstructure is refined to 44 nm and 1.55nm, respectively, with Ca<sup>2+</sup> increasing up to <i>x</i> = 0.15. While lowering the leakage current density after Ca<sup>2+</sup> modification, the breakdown field strength of Ca<sup>2+</sup>-doped BZT thin films is improved significantly approaching 4210 kV/cm at <i>x</i> = 0.15. Because of the enlarged polarization difference (<i>P</i><sub>m</sub>–<i>P</i><sub>r</sub>), the nano grain Ba<sub>0.85</sub>Ca<sub>0.15</sub> Zr<sub>0.2</sub>Ti<sub>0.8</sub>O<sub>3</sub> thin film possesses an elevated energy storage density of 33.1 J/cm<sup>3</sup> and an acceptable energy storage efficiency of 62.1% at the ultrahigh breakdown field. The Ca-doped BZT films also have remarkable cycle reliability showing a significant potential for capacitor applications. </p>

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Energy storage properties and enhanced breakdown strength of calcium-doped barium zirconate titanate thin films prepared by the sol–gel method

  • Xing Zhang,
  • Chen Zhang,
  • Haoliang Li,
  • Zhipeng Ma,
  • Jingwang Lu,
  • Ke Zhang

摘要

Calcium (Ca2+)-doped BZT thin films, Ba1-xCax Zr0.2Ti0.8O3 (x = 0, 0.05, 0.1, 0.15 and 0.2), were synthesized on the Pt/Ti/SiO2/Si substrates via sol–gel spin-coating techniques for pulse capacitor applications. The microstructures, ferroelectric properties and energy storage performance of Ba1-xCaxZr0.2Ti0.8O3 thin films were characterized while adjusting the Ca2+ concentration. It is found that the Ca2+-doped BZT thin films exhibit single-phase perovskite structure. On increasing the Ca2+ concentration, the cell volume and tolerance factor declined due to the replacement of Ca2+ ions for the A-site ions in the BZT lattice. The average grain size and root-mean-square (RMS) roughness of Ba1-xCax Zr0.2Ti0.8O3 thin films with dense and uniform microstructure is refined to 44 nm and 1.55nm, respectively, with Ca2+ increasing up to x = 0.15. While lowering the leakage current density after Ca2+ modification, the breakdown field strength of Ca2+-doped BZT thin films is improved significantly approaching 4210 kV/cm at x = 0.15. Because of the enlarged polarization difference (PmPr), the nano grain Ba0.85Ca0.15 Zr0.2Ti0.8O3 thin film possesses an elevated energy storage density of 33.1 J/cm3 and an acceptable energy storage efficiency of 62.1% at the ultrahigh breakdown field. The Ca-doped BZT films also have remarkable cycle reliability showing a significant potential for capacitor applications.