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<p>TiO<sub>2</sub>/Cu/TiO<sub>2</sub> multilayer films were prepared on quartz glass by magnetron sputtering, and the effects of Cu film thickness on the electrical, optical and electromagnetic shielding performance of TiO<sub>2</sub>/Cu/TiO<sub>2</sub> multilayer films were investigated. The results show that with the increase of Cu film thickness from 14 to 34&#xa0;nm, the square resistance of TiO<sub>2</sub>/Cu/TiO<sub>2</sub> multilayer films gradually decreases from 13.1 to 3.29 Ω, and the average visible light transmittance of the multilayer films drops from 80.2% to 66.0%. With the increase of Cu film thicknesses, electromagnetic shielding performance of TiO<sub>2</sub>/Cu/TiO<sub>2</sub> multilayer films exhibits an upward trend. The total electromagnetic shielding effectiveness (<i>SE</i><sub><i>T</i></sub>) of TiO<sub>2</sub>/Cu/TiO<sub>2</sub> multilayer film (30/34/30&#xa0;nm thick) reaches the maximum, and the <i>SE</i><sub><i>T</i></sub> value of the multilayer film exceeds 19&#xa0;dB.</p>

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Research on optical transmittance and electromagnetic shielding effectiveness of TiO2/Cu/TiO2 multilayer film

  • 期刊论文

  • 发表日期：

    2025年1月9日

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  • Linlin Lu,
  • Zhenghua Yang,
  • Jie Xu,
  • Jie Dong

摘要

TiO2/Cu/TiO2 multilayer films were prepared on quartz glass by magnetron sputtering, and the effects of Cu film thickness on the electrical, optical and electromagnetic shielding performance of TiO2/Cu/TiO2 multilayer films were investigated. The results show that with the increase of Cu film thickness from 14 to 34 nm, the square resistance of TiO2/Cu/TiO2 multilayer films gradually decreases from 13.1 to 3.29 Ω, and the average visible light transmittance of the multilayer films drops from 80.2% to 66.0%. With the increase of Cu film thicknesses, electromagnetic shielding performance of TiO2/Cu/TiO2 multilayer films exhibits an upward trend. The total electromagnetic shielding effectiveness (SET) of TiO2/Cu/TiO2 multilayer film (30/34/30 nm thick) reaches the maximum, and the SET value of the multilayer film exceeds 19 dB.