<p>High-sphericity powders, characterized by good fluidity, uniform particle size distribution, high bulk density and other advantages have become important basic materials in advanced manufacturing industry. RF plasma spheroidization is an important technique to prepare high-spherical powder with no electrode pollution, ultra-high temperature, high-purity gas source, good spheroidization performance, and this approach overcomes the challenge of precisely shaping irregular feedstock powders. In this paper, we review research progress on effects of raw materials properties and process parameters on the spheroidization effect: Small particles are easily completely melted but easy to aggregate; large particles are prone to unmelted cores; high purity of raw materials can improve the spheroidization rate of powder and reduce impurity content; adjust the angle between the injection tube and the central electrode, control the carrier gas flow rate and feeding position so that the moving trajectory of the powder is consistent with the high-temperature region of the plasma torch; reasonably control the RF power within a suitable range to make the particles heated evenly; different process parameters interact with each other, thereby affecting spheroidization behavior. Current problems include strong parameter nonlinearity, low energy efficiency, difficult scale-up production, and high equipment cost. By combining computational fluid dynamics simulation with machine learning algorithm for prediction and real-time adjustment. Through analyzing the current situation of preparation method and optimization strategy of high-performance spherical powders, it provides an important reference basis for further promotion and application of RF plasma spheroidization technology from two aspects: theoretical research and technological development.</p> Graphical Abstract <p></p>