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<p>This study presents a newly designed force sensor based on a Photonic Crystal Mach–Zehnder Interferometer (PC-MZI). The proposed force sensor is designed using Silicon-on-Insulator (SOI) technology. The mechanical micro cantilever beam (MCB) in conjunction with PC-MZI is modeled and evaluated with the finite element and Finite-Difference-Time-Domain (FDTD) methods. The Finite-Difference Time-Domain (FDTD) method is applied to model, analyze, and optimize the PC-MZI structure to achieve a high quality factor. The optimized structure serves as the sensing element. The band gap of the sensor MZI is evaluated employing PWE band solver from optiFDTD designer. To experience maximum stress and to obtain higher sensitivity, sensing arm of PC-MZI is integrated at fixed end of MCB and reference arm of PC-MZI is integrated on the base of micro cantilever base. When the cantilever beam’s free end receives a force, the volume average stress in the sensing arm portion of PC-MZI increases, which is determined with the FEM approach. Increasing the applied stress in the sensing arm enhances its effective refractive index, which in turn produces a linear shift in the resonant wavelength of the transmission spectrum at the PC-MZI output waveguide. The Finite-Difference Time-Domain (FDTD) method is employed to examine electromagnetic wave propagation within the proposed force sensor. The proposed device exhibits a minimum detectable force of 32.25 nN, a maximum quality factor of 22,129, and a sensitivity of 2.17 nm/<InlineEquation ID="IEq1"> <EquationSource Format="TEX">\(\upmu\)</EquationSource> <EquationSource Format="MATHML"><math> <mi mathvariant="normal">μ</mi> </math></EquationSource> </InlineEquation>N. Moreover, the sensor demonstrates a linear response across an applied force range of 0 to 3 <InlineEquation ID="IEq2"> <EquationSource Format="TEX">\(\upmu\)</EquationSource> <EquationSource Format="MATHML"><math> <mi mathvariant="normal">μ</mi> </math></EquationSource> </InlineEquation>N.</p>

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Design, analysis and optimization of photonic crystal Mach-Zehnder-Interferometer based force sensor

  • 期刊论文

  • 发表日期：

    2026年6月2日

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  • Basavaprasad,
  • Venkateswara Rao Kolli,
  • Srinivas Talabattula

摘要

This study presents a newly designed force sensor based on a Photonic Crystal Mach–Zehnder Interferometer (PC-MZI). The proposed force sensor is designed using Silicon-on-Insulator (SOI) technology. The mechanical micro cantilever beam (MCB) in conjunction with PC-MZI is modeled and evaluated with the finite element and Finite-Difference-Time-Domain (FDTD) methods. The Finite-Difference Time-Domain (FDTD) method is applied to model, analyze, and optimize the PC-MZI structure to achieve a high quality factor. The optimized structure serves as the sensing element. The band gap of the sensor MZI is evaluated employing PWE band solver from optiFDTD designer. To experience maximum stress and to obtain higher sensitivity, sensing arm of PC-MZI is integrated at fixed end of MCB and reference arm of PC-MZI is integrated on the base of micro cantilever base. When the cantilever beam’s free end receives a force, the volume average stress in the sensing arm portion of PC-MZI increases, which is determined with the FEM approach. Increasing the applied stress in the sensing arm enhances its effective refractive index, which in turn produces a linear shift in the resonant wavelength of the transmission spectrum at the PC-MZI output waveguide. The Finite-Difference Time-Domain (FDTD) method is employed to examine electromagnetic wave propagation within the proposed force sensor. The proposed device exhibits a minimum detectable force of 32.25 nN, a maximum quality factor of 22,129, and a sensitivity of 2.17 nm/ \(\upmu\) μ N. Moreover, the sensor demonstrates a linear response across an applied force range of 0 to 3 \(\upmu\) μ N.