Photoluminescence Spectra of Stacking Defects in 4H-SiC Crystals
摘要
Cree 4H-SiC single crystal wafers were studied by high-resolution nondestructive photoluminescence (PL) at room temperature to investigate experimentally near-band-edge (NBE) and stacking fault PL. The contribution of stacking fault PL to the PL spectrum of the original 4H-SiC crystals allowed the intensity ratios of band-to-band, NBE, and stacking fault PL to be evaluated. The experimental PL spectrum of 4H-SiC obeyed a Lorentzian distribution. Electron–phonon interaction led to a significant mutual dependence of the band-to-band, NBE, and stacking fault PL intensities.