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<p>The widespread industrial application of terahertz spectroscopy is currently constrained by system complexity, high costs, and limited measurement rates. Optoelectronic frequency-domain spectroscopy (FDS) offers a promising approach to mitigate the system complexity and costs. To address the need for fast measurement rates, we present the first terahertz spectrometer capable of a flexible sparse sensing measurement mode, achieving a 6.25-fold increase in measurement rate compared to state-of-the-art FDS systems. The cycle through eight discrete frequencies in a 1.5-THz window is acquired in 800 µs and achieves a peak dynamic range exceeding 90 dB in 800 ms. We apply this scheme to a multi-layer thickness evaluation, showing a maximum single-shot standard deviation of 2 µm across all three layers. The sparse sensing method shows equivalent layer thickness accuracy per measurement time when compared to a full spectral scan with a state-of-the-art spectrometer.</p>

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Sparse Terahertz Frequency-Domain Sensing with Kilohertz Measurement Rate

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年7月30日

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  • Lauri Schwenson,
  • Florian Walter,
  • Alexander Jäckel,
  • Konstantin Wenzel,
  • Lars Liebermeister,
  • Cornelius Mach,
  • Enrique Castro-Camus,
  • Martin Koch,
  • Martin Schell,
  • Robert B. Kohlhaas

摘要

The widespread industrial application of terahertz spectroscopy is currently constrained by system complexity, high costs, and limited measurement rates. Optoelectronic frequency-domain spectroscopy (FDS) offers a promising approach to mitigate the system complexity and costs. To address the need for fast measurement rates, we present the first terahertz spectrometer capable of a flexible sparse sensing measurement mode, achieving a 6.25-fold increase in measurement rate compared to state-of-the-art FDS systems. The cycle through eight discrete frequencies in a 1.5-THz window is acquired in 800 µs and achieves a peak dynamic range exceeding 90 dB in 800 ms. We apply this scheme to a multi-layer thickness evaluation, showing a maximum single-shot standard deviation of 2 µm across all three layers. The sparse sensing method shows equivalent layer thickness accuracy per measurement time when compared to a full spectral scan with a state-of-the-art spectrometer.