<p>The paper presents the results of studying the properties of polycrystalline powders and films of CsCu₂Br₃ and CsCu₂I₃ compounds obtained by vacuum thermal evaporation. X-ray phase analysis confirmed the formation of single-phase films which showed good agreement with the initial compositions. The microstructure of the films was studied by scanning electron microscopy. The CsCu₂I₃ and CsCu₂Br₃ films were found to comprise rounded crystals ranging in size from tens nanometers to 200 nm. The obtained results confirm the potential of applying vacuum thermal evaporation for depositing CsCu₂Br₃ and CsCu₂I₃ films for application in the field of optoelectronics. However, in order to obtain thicker and more continuous films, a sufficiently long duration of the sputtering process must be ensured.</p>