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<p>The Rockets for Extended-source X-ray Spectroscopy (tREXS) grating spectrograph uses modules of reflection gratings to collect spectroscopic data from extended astronomical sources of soft X-rays. Two blazed master gratings were produced on silicon substrates with electron-beam lithography (EBL) and complementary nanofabrication processes that include KOH etching. Substrate-conformal imprint lithography (SCIL) was then used to create 191 replicas of the two grating masters for use in the flight instrument. Diffraction efficiency was measured for several replica gratings, which achieve a peak of <InlineEquation ID="IEq1"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10686_2025_10011_Article_IEq1.gif" Format="GIF" Height="13" Rendition="HTML" Resolution="72" Type="Linedraw" Width="21" /> </InlineMediaObject> <EquationSource Format="TEX">\( \varvec{&gt;} \)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mo mathvariant="bold">&gt;</mo> </mrow> </math></EquationSource> </InlineEquation>70% absolute efficiency near 0.22&#xa0;keV and an average of <InlineEquation ID="IEq2"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10686_2025_10011_Article_IEq2.gif" Format="GIF" Height="11" Rendition="HTML" Resolution="72" Type="Linedraw" Width="19" /> </InlineMediaObject> <EquationSource Format="TEX">\( \varvec{\approx } \)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mo mathvariant="bold">≈</mo> </mrow> </math></EquationSource> </InlineEquation>50% absolute efficiency across the measured band, from 0.18&#xa0;–&#xa0;0.8&#xa0;keV. Here we detail the nanofabrication of the grating masters, including the EBL parameters and tREXS-specific fabrication considerations, and the SCIL replication process used to generate the final instrument gratings. A discussion of grating characterization and areas for future improvement is also presented.</p>

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Reflection grating fabrication for the Rockets for Extended-source X-ray Spectroscopy

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  • 发表日期：

    2025年6月14日

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  • Drew M. Miles,
  • Ross McCurdy,
  • Michael Labella,
  • Randall L. McEntaffer,
  • Fabien Grisé,
  • Jake McCoy,
  • James H. Tutt

摘要

The Rockets for Extended-source X-ray Spectroscopy (tREXS) grating spectrograph uses modules of reflection gratings to collect spectroscopic data from extended astronomical sources of soft X-rays. Two blazed master gratings were produced on silicon substrates with electron-beam lithography (EBL) and complementary nanofabrication processes that include KOH etching. Substrate-conformal imprint lithography (SCIL) was then used to create 191 replicas of the two grating masters for use in the flight instrument. Diffraction efficiency was measured for several replica gratings, which achieve a peak of \( \varvec{>} \) > 70% absolute efficiency near 0.22 keV and an average of \( \varvec{\approx } \) ≈ 50% absolute efficiency across the measured band, from 0.18 – 0.8 keV. Here we detail the nanofabrication of the grating masters, including the EBL parameters and tREXS-specific fabrication considerations, and the SCIL replication process used to generate the final instrument gratings. A discussion of grating characterization and areas for future improvement is also presented.