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<p>This research outlines the design and computational modelling of a MEMS-based capacitive pressure sensor, incorporating a circular diaphragm with meandering structures and perforations, for the purpose of low-pressure healthcare monitoring applications. The parameters maximum diaphragm deflection, capacitance variation, mechanical sensitivity, capacitive sensitivity and Eigen frequency have been analyzed in the low-pressure range of 0–3&#xa0;kPa. High sensitivity is achieved by developing enhanced deflections in the diaphragm by using the crab-leg meanders. The design is also compared with the basic structures without meanders and inferred that the perforated diaphragm with meanders shows large sensitivity of 2.5461&#xa0;kPa<sup>−1</sup>. The design is well suited in the low-pressure range of 0–3&#xa0;kPa for health care monitoring.</p>

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Analysis on sensitivity enhancement of MEMS based capacitive pressure sensor for low pressure healthcare monitoring

  • 期刊论文

  • 发表日期：

    2025年5月13日

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  • Kavitha Jagabathuni,
  • Swapna Peravali

摘要

This research outlines the design and computational modelling of a MEMS-based capacitive pressure sensor, incorporating a circular diaphragm with meandering structures and perforations, for the purpose of low-pressure healthcare monitoring applications. The parameters maximum diaphragm deflection, capacitance variation, mechanical sensitivity, capacitive sensitivity and Eigen frequency have been analyzed in the low-pressure range of 0–3 kPa. High sensitivity is achieved by developing enhanced deflections in the diaphragm by using the crab-leg meanders. The design is also compared with the basic structures without meanders and inferred that the perforated diaphragm with meanders shows large sensitivity of 2.5461 kPa−1. The design is well suited in the low-pressure range of 0–3 kPa for health care monitoring.