Electrochemically-Induced Deformation Mechanism and Actuation Properties of Nanoporous Ni-Based Composite Films
摘要
Advances in nanotechnology and smart materials enable electrochemical field control of material deformation, a promising actuation technology with extensive applications across various fields such as sensing and microelectromechanical systems. However, most thin-film electrochemical actuators exhibit limited deformation and rely on costly materials, hindering wider use. To address these limitations, this study developed a nanoporous Ni-based thin-film actuator. Using density functional theory calculations on the Vienna Ab initio Simulation Package platform, along with atomic force microscopy and strain monitoring techniques, we investigated its deformation mechanism under different electrochemical adsorption processes. Based on findings on stress distribution and deformation characteristics of sputtered Ni thin films under electrochemical processes, a nanoporous Ni-based composite material was designed and fabricated via chemical dealloying to enhance its practical actuation performance. This material achieved a maximum deflection angle of 31.5° with remarkable durability, and its deformation characteristics could be controlled by the electrochemical potential. This study offers a promising strategy for developing innovative electrochemical actuator materials.