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<p>We study the axisymmetric frictionless indentation problem of a piezoelectric semiconductor (PSC) thin film perfectly bonded to a semi-infinite isotropic elastic substrate by a rigid and insulating spherical indenter. The Hankel integral transformation is first employed to derive the general solutions for the governing differential equations of the PSC film and elastic substrate. Then, using the boundary and interface conditions, the complicated indentation problem is reduced to numerically solve a Fredholm integral equation of the second kind. Numerical results are given to demonstrate the effects of semiconducting property, film thickness as well as Young’s modulus and Poisson’s ratio of the substrate on the indentation responses. The obtained findings will contribute to the establishment of indentation experiments for PSC film/substrate systems.</p>

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Spherical Indentation on a Piezoelectric Semiconductor Film/Elastic Substrate System

  • 期刊论文

  • 发表日期：

    2025年2月15日

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  • Shijing Gao,
  • Guoquan Nie,
  • Jinxi Liu,
  • Weiqiu Chen

摘要

We study the axisymmetric frictionless indentation problem of a piezoelectric semiconductor (PSC) thin film perfectly bonded to a semi-infinite isotropic elastic substrate by a rigid and insulating spherical indenter. The Hankel integral transformation is first employed to derive the general solutions for the governing differential equations of the PSC film and elastic substrate. Then, using the boundary and interface conditions, the complicated indentation problem is reduced to numerically solve a Fredholm integral equation of the second kind. Numerical results are given to demonstrate the effects of semiconducting property, film thickness as well as Young’s modulus and Poisson’s ratio of the substrate on the indentation responses. The obtained findings will contribute to the establishment of indentation experiments for PSC film/substrate systems.