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<p><?tk 4?>We investigate the influence of the oxygen fraction in the Ar: O<sub>2</sub> working gas and the simultaneous inclusion of Au on TiO<sub>2</sub>-based thin films. The coatings are made by DC reactive magnetron Co-sputtering. XRD studies reveal a crystalline structure with anatase and rutile TiO<sub>2</sub> in addition to metallic Au. FTIR spectra demonstrate the main Ti-O and Ti-O-Ti vibrations, while SEM observation illustrates compact, crack-free nanostructured surfaces with an average particle size around 70&#xa0;nm. EDX measurements confirm the presence of Ti, O and Au without apparent impurities. The optical measurements indicate that the addition of Au and the optimum gas ratio change the absorption response of the material toward the visible range and decrease the optical band gap from about 3.2 to nearly 2.9&#xa0;eV. Results of this enhanced response are attributed to plasmon-assisted absorption at Au locations and better separation of photogenerated charge carriers.</p>

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Optimization of Ar:O₂ gas ratio in DC reactive co-sputtering for enhanced structural and plasmonic properties of TiO₂/Au thin films

  • 期刊论文

  • 发表日期：

    2026年7月28日

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  • Tawfiq S. Mahdi,
  • Mohammed A. Hameed,
  • Esraa A. Al-Oubidy,
  • Ahmed B. Taha

摘要

We investigate the influence of the oxygen fraction in the Ar: O2 working gas and the simultaneous inclusion of Au on TiO2-based thin films. The coatings are made by DC reactive magnetron Co-sputtering. XRD studies reveal a crystalline structure with anatase and rutile TiO2 in addition to metallic Au. FTIR spectra demonstrate the main Ti-O and Ti-O-Ti vibrations, while SEM observation illustrates compact, crack-free nanostructured surfaces with an average particle size around 70 nm. EDX measurements confirm the presence of Ti, O and Au without apparent impurities. The optical measurements indicate that the addition of Au and the optimum gas ratio change the absorption response of the material toward the visible range and decrease the optical band gap from about 3.2 to nearly 2.9 eV. Results of this enhanced response are attributed to plasmon-assisted absorption at Au locations and better separation of photogenerated charge carriers.