Integration of planar polarization management for advanced liquid crystal SLM devices
摘要
This project presents the design and fabrication of a polarization-independent liquid crystal-on-a-silicon (PI-LCoS) phase modulator that utilizes a polymer quarter-wave plate (QWP) for polarization conversion. The device features a novel silicon backplane including DRAM-based analog pixel circuit with fine grayscale control, and small pixel size, achievable using standard foundry processes. We demonstrate polarization-independent phase modulation through beam steering tests under various input polarizations, achieving high optical efficiency and low polarization-dependent loss (PDL) of less than 0.6 dB. The proposed device, with its frame-at-a-time update and simplified waveplate fabrication process, offers significant advantages for commercial applications such as wavelength-selective switches, holographic displays, adaptive optics, and free-space optical communication systems.