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<p>A bundle of digitally directed beams, capable of instantaneously controlling their direction at every point within a field of view, is proposed for the inspection of microscale defects in manufacturing processes.</p>

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Digitally directed beams for microscale inspection

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2025年4月24日

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  • Hiroshi Ohno

摘要

A bundle of digitally directed beams, capable of instantaneously controlling their direction at every point within a field of view, is proposed for the inspection of microscale defects in manufacturing processes.