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<p>Scanning electrochemical probe techniques are powerful methods for electrochemical patterning in micro and nanoscale. This review covers the electrochemical patterning in both 2D and 3D through selected examples. These include generation-collection and direct mode scanning electrochemical microscopy (SECM), scanning electrochemical cell microscopy (SECCM) and scanning gel electrochemical microscopy (SGECM). The vertical resolution in SECM and the lateral resolution of SECCM patterning have both achieved &lt; 100&#xa0;nm. The direct mode SECM and SECCM are in theory applicable to all electrodeposition reactions in terms of chemistry, which is a great advantage over competing techniques such as inkjet printing and lithography. The main issues of the techniques, <i>i.e.</i> the control and the speed, are discussed in a critical way with constructive prospects proposed.</p>

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Scanning electrochemical probe techniques for 2D/3D patterning at micro and nanoscale

  • 期刊论文

  • 发表日期：

    2024年12月31日

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  • Liang Liu

摘要

Scanning electrochemical probe techniques are powerful methods for electrochemical patterning in micro and nanoscale. This review covers the electrochemical patterning in both 2D and 3D through selected examples. These include generation-collection and direct mode scanning electrochemical microscopy (SECM), scanning electrochemical cell microscopy (SECCM) and scanning gel electrochemical microscopy (SGECM). The vertical resolution in SECM and the lateral resolution of SECCM patterning have both achieved < 100 nm. The direct mode SECM and SECCM are in theory applicable to all electrodeposition reactions in terms of chemistry, which is a great advantage over competing techniques such as inkjet printing and lithography. The main issues of the techniques, i.e. the control and the speed, are discussed in a critical way with constructive prospects proposed.