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<p>This work presents an accelerometer that uses capacitive sensing mechanisms. In the proposed structure, the accelerations are sensed by differential capacitances. This structure has a size of 500&#xa0;μm × 450&#xa0;μm × 6&#xa0;μm with a measurement range of ± 50&#xa0;g. Simulated results show that the sensitivities of the accelerometer are 3.04&#xa0;mV/g and 0.034&#xa0;mV/g for the Y-axis and Z-axis, respectively. Moreover, the cross-axis sensitivities of the structure are less than 1%. Brownian noises in each direction are 0.9&#xa0;µg/√Hz for the y-axis, and 1.5&#xa0;µg/√Hz for the z-axis. In this study, we employed the finite element software as a simulation tool to analyze the characteristics of the accelerometer.</p>

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Design and simulation of a MEMS single proof mass capacitive accelerometer with integral parallel-plate capacitors

  • 期刊论文

  • 发表日期：

    2026年7月15日

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  • Xinyu Zou,
  • Guijuan Zhao,
  • Zonglin Weng,
  • Guipeng Liu

摘要

This work presents an accelerometer that uses capacitive sensing mechanisms. In the proposed structure, the accelerations are sensed by differential capacitances. This structure has a size of 500 μm × 450 μm × 6 μm with a measurement range of ± 50 g. Simulated results show that the sensitivities of the accelerometer are 3.04 mV/g and 0.034 mV/g for the Y-axis and Z-axis, respectively. Moreover, the cross-axis sensitivities of the structure are less than 1%. Brownian noises in each direction are 0.9 µg/√Hz for the y-axis, and 1.5 µg/√Hz for the z-axis. In this study, we employed the finite element software as a simulation tool to analyze the characteristics of the accelerometer.