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<p>Micro-Electro-Mechanical Systems-based Devices (MEMSD or MEMS-based devices) are an enabling technology that improves the user experience of a wide range of products. MEMSDs are miniaturized mechanical and electro-machines fabricated using microfabrication technology. While increasingly substrates and thin film materials are available for the&#xa0;micro-processing of MEMSD, the choice of a specific material is seldom based on a quantifiable parameter related to the optimal operation and the application of the device. Complex structures, devices, and systems can be produced using micromachining and MEMSD technologies. This paper provides a comprehensive review of the materials for MEMS-based devices and their fabrication process. The review ends with a discussion of unsolved issues and the&#xa0;potential future of developing materials for challenging environments. Overall, by highlighting the developments in this quickly developing area, this study offers a useful resource for scientists, researchers, and engineers working in the field of MEMS-based devices.</p>

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A review of recent advancements on materials and methods for microelectromechanical system-based devices

  • 期刊论文

  • 发表日期：

    2026年2月14日

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  • Swarnalatha Veerla,
  • Sreejith Vattaparambil Sreedharan,
  • Shuai Ju,
  • Mitali Hardik Desai,
  • Haifeng Zhang

摘要

Micro-Electro-Mechanical Systems-based Devices (MEMSD or MEMS-based devices) are an enabling technology that improves the user experience of a wide range of products. MEMSDs are miniaturized mechanical and electro-machines fabricated using microfabrication technology. While increasingly substrates and thin film materials are available for the micro-processing of MEMSD, the choice of a specific material is seldom based on a quantifiable parameter related to the optimal operation and the application of the device. Complex structures, devices, and systems can be produced using micromachining and MEMSD technologies. This paper provides a comprehensive review of the materials for MEMS-based devices and their fabrication process. The review ends with a discussion of unsolved issues and the potential future of developing materials for challenging environments. Overall, by highlighting the developments in this quickly developing area, this study offers a useful resource for scientists, researchers, and engineers working in the field of MEMS-based devices.