Scholarlink

<p>SAW sensors are distinguished by the compact size, passive wireless operation, and sensitivity to multiple physical parameters, which assure widely applications across various fields. We present the design of a highly sensitive SAW micro-pressure sensor featuring a multi-layer structure and an inertial cantilever beam. The working principle is theoretically analyzed, and finite element method (FEM) simulations are conducted to compare the performance of cantilever beams, simply supported beams and circular membranes. The optimal placement of interdigital transducers (IDTs) is determined, the effects of dimensional parameters and material properties are assessed with performances of broadened frequency range and improved sensitivities. The fabrication process is finalized besides the developed testing system. Experimental results confirm high sensitivity to micro pressure, with distinct resonant frequency shifts observed under varying pressure conditions.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

High-sensitivity SAW micro-pressure sensor with cantilever beam structure: optimization of IDT and electrode

  • 期刊论文

  • 发表日期：

    2026年1月28日

查看全文
  • Zhuoyue Duan,
  • Peng Yin,
  • Tao Wang,
  • Xiaotao Yu,
  • Wei Ji,
  • Jihua Lu,
  • Lihui Feng

摘要

SAW sensors are distinguished by the compact size, passive wireless operation, and sensitivity to multiple physical parameters, which assure widely applications across various fields. We present the design of a highly sensitive SAW micro-pressure sensor featuring a multi-layer structure and an inertial cantilever beam. The working principle is theoretically analyzed, and finite element method (FEM) simulations are conducted to compare the performance of cantilever beams, simply supported beams and circular membranes. The optimal placement of interdigital transducers (IDTs) is determined, the effects of dimensional parameters and material properties are assessed with performances of broadened frequency range and improved sensitivities. The fabrication process is finalized besides the developed testing system. Experimental results confirm high sensitivity to micro pressure, with distinct resonant frequency shifts observed under varying pressure conditions.