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<p>With the development of MEMS technology, it become more and more critical to compensate adjacent convex corners during anisotropic etching (100) oriented silicon wafers. The basic problem associated with corner compensation design is the large spatial requirement around convex corners. Simple compensation structures (e.g. square, triangle, &lt; 100 &gt; and &lt; 110 &gt; strip) cannot be employed as they cannot be fitted in the existing space around adjacent corners. In this paper, a combined convex corner compensation pattern composed of two &lt; 110 &gt; oriented clamped–clamped beams, four free branches and four wide beams is designed to protect convex corners of crossed dividing grooves with a V-shaped or trapezoidal cross section. Different from the &lt; 110 &gt; oriented strip with one free end reported in previous literature, the etching solution lateral undercuts the clamped–clamped beams from two sides of clamped–clamped beams instead of from the free end. The lateral undercutting rate is only 10.6% of the etching rate of the (100) plane and 2.18% of the undercutting rate of &lt; 110 &gt; oriented strips. The novel convex corner compensation method greatly reduces the size of compensation pattern between adjacent convex corners and improves the yield.</p>

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A novel convex corner compensation method for etching crossed dividing grooves by lateral undercutting < 100 > oriented clamped–clamped beams

  • 期刊论文

  • 发表日期：

    2025年9月11日

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  • Jianqiang Han,
  • Yuxiang Xu,
  • Zhichao Zhang

摘要

With the development of MEMS technology, it become more and more critical to compensate adjacent convex corners during anisotropic etching (100) oriented silicon wafers. The basic problem associated with corner compensation design is the large spatial requirement around convex corners. Simple compensation structures (e.g. square, triangle, < 100 > and < 110 > strip) cannot be employed as they cannot be fitted in the existing space around adjacent corners. In this paper, a combined convex corner compensation pattern composed of two < 110 > oriented clamped–clamped beams, four free branches and four wide beams is designed to protect convex corners of crossed dividing grooves with a V-shaped or trapezoidal cross section. Different from the < 110 > oriented strip with one free end reported in previous literature, the etching solution lateral undercuts the clamped–clamped beams from two sides of clamped–clamped beams instead of from the free end. The lateral undercutting rate is only 10.6% of the etching rate of the (100) plane and 2.18% of the undercutting rate of < 110 > oriented strips. The novel convex corner compensation method greatly reduces the size of compensation pattern between adjacent convex corners and improves the yield.