Enhancing pressure sensor performance through diaphragm geometry optimization for subsonic applications
摘要
The accurate evaluation of static pressure plays a vital role in subsonic applications within the realm of aerodynamics. The spatial distribution of static pressure critically influences the lift generation efficiency of wings in the subsonic regimes. In the present work, we study the micro-electromechanical system (MEMS)-based piezoresistive pressure sensor, precisely employed to measure static pressure on a scaled-down aircraft model. The analysis begins with modelling three distinct designs based on square, circular, and octahedral geometries. This provides valuable insights into the dynamic pressure distribution across the wing surfaces. Considering the subsonic pressure of 2 bar, the sensor is robustly designed with attention to diaphragm flexural rigidity, ensuring accurate pressure measurements under varying aerodynamic loads. Finite element simulations demonstrate that, for all three diaphragm geometries analyzed, the maximum induced stresses are concentrated along the edges, while the peak deflection consistently occurs at the center, guiding the optimal placement of piezoresistor in high-stress concentration zones. Additionally, temperature effects are examined, revealing that as temperature decreases, displacement increases despite the rise in silicon stiffness. This behavior is attributed to thermal effects, such as contraction and bending, which dominate over the increased stiffness. The reduction in stress and increase in displacement are driven by thermal mismatch and the partial freedom of the diaphragm to deform. Thinner diaphragms exhibit greater sensitivity, highlighting the need for thermal considerations in high-accuracy sensor design.