Reducing support, i.e., anchor, energy dissipation is a desired target in designing a microelectromechanical systems (MEMS) resonator with high quality factor (Q). This paper proposes two support tether structures, namely TYPE_A and TYPE_B, based on the acoustic wavelength ( \(\lambda \) ) to improve the Q of the length extensional mode MEMS resonator in terms of anchor quality factor ( \(Q_{ANC}\) ) enhancement. These support tethers consist of five \(\lambda \) based-rectangular-shaped bars which are arranged continuously. The resonator operates at the resonant frequency of 70.1 MHz. The numerical simulation results with the built-in finite element method (FEM) in COMSOL show that the optimized \(Q_{ANC}\) values of the resonator for both TYPE_A and TYPE_B achieve 73320.67, and 89893.84, respectively. These two proposed tether structures are also compared to the conventional \(\lambda /4\) one in enhancing the \(Q_{ANC}\) of the resonator, which show an increase of the \(Q_{ANC}\) about 105.95 and 129.9 times, respectively. Besides, they are also compared to the counterpart TWHL and respectively show outperformed \(Q_{ANC}\) values of 2.57 and 3.15 times. In addition, several un-optimized values of the \(Q_{ANC}\) for the both proposed configurations are also higher than that for the counterparts. Moreover, with an extension simulation of the resonator for five different resonant frequencies, both structures TYPE_A and TYPE_B also demonstrate their superior \(Q_{ANC}\) improvement over the two counterparts.
