Symmetry breaking and mechanical filter make a pseudo-gimbal-less two-dimensional MEMS scanning mirror with multiple scanning modes
摘要
Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Among them, harmonic resonant electromagnetic scanner and parametric resonant electrostatic scanner are the mainstream, due to their high scanning frequency and large scanning angle. Some shortcomings of parametric resonance, including double frequency of driver electronics and additional feedback control or frequency stabilization system, limit the further application of parametric resonant electrostatic scanner. This article aims to overcome the above problems by proposing a harmonic resonant electrostatic scanner. The symmetry of coplanar electrostatic comb actuator is broken due to the bending of comb finger caused by the mismatched residual in the material, and parametric resonance caused by symmetry is also replaced by harmonic resonance. Further, through adopting mechanical filter, two-dimensional scanning can be achieved through one set of actuators, which avoids the problem that two sets (each for one dimension) of electrostatic actuators must be insulated each other through complicated and expensive processes. A two-dimensional MEMS scanner based on symmetry breaking and mechanical filter was proposed and demonstrated. Multiple scanning modes can be achieved through selective control of a set of four identical actuators. In addition to harmonic resonance, symmetry can be re-achieved and parametric resonance can also be excited when actuators located at symmetrical positions are simultaneously driven. After comparison, the scanning angle of harmonic resonance is larger than that of parametric resonance, and the required voltage is lower. Quasistatic scanning and two-dimension scanning were also experimentally demonstrated.