Valveless micro piezoelectric pump and mixer with wide-angle diffusers: Effect analysis of diffuser angle though piezoelectric-fluid coupled simulation
摘要
Narrow-angle diffusers are often used for laminar flow in microfluidic devices to prevent boundary layer separation, but micro piezoelectric pumps and mixers generate oscillatory flow, requiring a new diffuser design. In this study, the effectiveness of wide-angle diffusers in pumping and mixing performance was verified by piezoelectric-fluid coupled analysis and experiments. The results show that the pumping performance was improved by a factor of 1.7 when the diffuser angle was increased from 10 to 30 deg. The diffuser angle that maximizes the pumping performance exists, and its mechanism was elucidated from the dependence of the flow rate on the diffuser angle during suction and discharge of the piezoelectric actuator. It was also clarified that a wide-angle diffuser has little effect on mixing performance.