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<p>A new variable LC filter is proposed in this paper. The proposed filter consists of a variable width inductor and a tuning capacitor. The outer turn of the inductor is the fixed electrode of the variable capacitor, simultaneously. The width of the inductor is variable to get high quality factor of 130–152 in the operating frequency (5.8–6.8 GHz). The tunability of the capacitor is approximately 35% in which the gap and overlap between the electrodes change. The quality factor of the designed capacitor is increased using floating technique to 570–690 in operating frequency. The total quality factor of the filter is 105–125. The electrostatic actuation mechanism is used in this filter for displacement of the fingers with actuation voltage of 135&#xa0;V. The designed filter size is 1.2 × 1.4 mm, the scattering parameters S<sub>11</sub> is − 23 to − 18 dB, S<sub>21</sub> is − 1 dB, and the group delay is lower than 0.7 ns. The COMSOL Multiphysics and HFSS Software’s were used for simulations.</p>

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A new high quality factor MEMS tunable LC filter for UHF applications

  • 期刊论文

  • 发表日期：

    2025年1月6日

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  • Davoud Razaghpour,
  • Mir Majid Ghasemi,
  • Amir Fathi

摘要

A new variable LC filter is proposed in this paper. The proposed filter consists of a variable width inductor and a tuning capacitor. The outer turn of the inductor is the fixed electrode of the variable capacitor, simultaneously. The width of the inductor is variable to get high quality factor of 130–152 in the operating frequency (5.8–6.8 GHz). The tunability of the capacitor is approximately 35% in which the gap and overlap between the electrodes change. The quality factor of the designed capacitor is increased using floating technique to 570–690 in operating frequency. The total quality factor of the filter is 105–125. The electrostatic actuation mechanism is used in this filter for displacement of the fingers with actuation voltage of 135 V. The designed filter size is 1.2 × 1.4 mm, the scattering parameters S11 is − 23 to − 18 dB, S21 is − 1 dB, and the group delay is lower than 0.7 ns. The COMSOL Multiphysics and HFSS Software’s were used for simulations.