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<p>This study investigates sandwich FGM diaphragms for high-temperature capacitive pressure sensors. A three-dimensional high-order shear deformation theory with novel polynomial–trigonometric shape function is developed, with solutions obtained using Galerkin’s method. Results reveal boundary conditions significantly impact performance, with clamped boundary conditions reducing deflection by 50.75% versus simply supported boundary conditions. Material composition in sandwich FGM diaphragms substantially affects sensitivity, as metal-rich configurations (1-3-1) demonstrate 6.01% higher capacitive response than ceramic-rich configurations (2-1-2). Geometric parameters create competing effects: Increased width enhances sensitivity up to 37.36%, while thicker plates show reduced responsiveness despite higher initial capacitance. The inclusion of elastic foundation modeling reveals how foundation stiffness modulates both sensitivity and linearity, providing an additional design parameter for application-specific optimization. Temperature gradients and microscale effects further enable fine-tuning of sensor performance. The analytical model shows excellent agreement with finite element simulations (discrepancies &lt; 5%), offering valuable design guidelines for high-temperature pressure-sensing applications.</p>

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Thermo-mechanical response of sandwich FGM diaphragms in capacitive sensors using 3D shear deformation theory

  • 期刊论文

  • 发表日期：

    2025年12月21日

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  • Bing Han,
  • Xiongzhu Bu,
  • Yue Shen,
  • Fan Chen,
  • Yihan Cao,
  • Maojun Fan

摘要

This study investigates sandwich FGM diaphragms for high-temperature capacitive pressure sensors. A three-dimensional high-order shear deformation theory with novel polynomial–trigonometric shape function is developed, with solutions obtained using Galerkin’s method. Results reveal boundary conditions significantly impact performance, with clamped boundary conditions reducing deflection by 50.75% versus simply supported boundary conditions. Material composition in sandwich FGM diaphragms substantially affects sensitivity, as metal-rich configurations (1-3-1) demonstrate 6.01% higher capacitive response than ceramic-rich configurations (2-1-2). Geometric parameters create competing effects: Increased width enhances sensitivity up to 37.36%, while thicker plates show reduced responsiveness despite higher initial capacitance. The inclusion of elastic foundation modeling reveals how foundation stiffness modulates both sensitivity and linearity, providing an additional design parameter for application-specific optimization. Temperature gradients and microscale effects further enable fine-tuning of sensor performance. The analytical model shows excellent agreement with finite element simulations (discrepancies < 5%), offering valuable design guidelines for high-temperature pressure-sensing applications.