Scholarlink

<p>This study presents a coplanar three-beam laser interference lithography (LIL) method for fabricating biomimetic moth-eye structures. The research delves into the mechanism of cross-scale two-periodic structure formation and devises a double-exposure lithography approach based on coplanar three-beam interference to regulate the parameters of these structures. A comparison with microlens arrays of the same period reveals that the biomimetic moth-eye structure shows enhanced transmittance and a wider field of view, attributable to its internal nanoscale arrays. The contrast of diffracted light distribution between the two structures further validates that the unique structural features of the biomimetic moth-eye structure lead to a more uniform light distribution. This work offers a facile method for fabricating biomimetic moth-eye structures, holding potential applications in diverse optical domains, including high-efficiency optical sensors, anti-reflective coatings, and advanced imaging systems.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Biomimetic moth-eye structures fabricated by double-exposure lithography using coplanar three-beam laser interference

  • 期刊论文

  • 发表日期：

    2025年5月9日

查看全文
  • Litong Dong,
  • Xiangyu Li,
  • Mengnan Liu,
  • Lu Wang,
  • Zuobin Wang,
  • Dayou Li

摘要

This study presents a coplanar three-beam laser interference lithography (LIL) method for fabricating biomimetic moth-eye structures. The research delves into the mechanism of cross-scale two-periodic structure formation and devises a double-exposure lithography approach based on coplanar three-beam interference to regulate the parameters of these structures. A comparison with microlens arrays of the same period reveals that the biomimetic moth-eye structure shows enhanced transmittance and a wider field of view, attributable to its internal nanoscale arrays. The contrast of diffracted light distribution between the two structures further validates that the unique structural features of the biomimetic moth-eye structure lead to a more uniform light distribution. This work offers a facile method for fabricating biomimetic moth-eye structures, holding potential applications in diverse optical domains, including high-efficiency optical sensors, anti-reflective coatings, and advanced imaging systems.