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<p>Femtosecond laser drilling is widely used for precision machining of ceramic matrix composites (CMCs), yet achieving micro-holes with low taper remains challenging due to non-uniform energy deposition. In this study, lateral lens ultrasonic vibration (LUV) assisted femtosecond laser drilling was proposed to improve hole quality. The effects of pulse energy (PE), laser frequency (LF), and pulse number per spot (NPs), together with LUV assistance, on the inlet diameter (<i>Din</i>), outlet diameter (<i>Dout</i>), and <i>taper</i> were systematically investigated using a Box–Behnken response surface design. The results indicate that increasing NPs and PE enlarges <i>Din</i> and <i>Dout</i> while reducing <i>taper</i>, whereas increasing LF produces the opposite effect. Statistical analysis shows that LF dominates the variation of <i>Din</i> and <i>Dout</i>, while NPs has the most significant influence on <i>taper</i>. The incorporation of LUV leads to an increase in <i>Dout</i> and a reduction in taper, which may be attributed to the improved laser energy distribution facilitated by LUV. Process optimization predicts an optimal set of parameters (PE = 500 µJ, LF = 20&#xa0;kHz, NPs = 20) under LUV, yielding a taper of approximately 1.3°, which corresponds to a reduction of about 19% relative to the condition without LUV. The proposed LUV-assisted femtosecond laser machining strategy provides an effective approach for improving micro-hole quality in CMC materials.</p>

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Lens ultrasonic vibration assisted femtosecond laser micro-hole drilling of ceramic matrix composites

  • 期刊论文

  • 发表日期：

    2026年7月29日

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  • Ma Chenbin,
  • Chen Xiaoxiao,
  • Zhang Shengsheng,
  • Xia Xinliang,
  • Zhang Wenwu

摘要

Femtosecond laser drilling is widely used for precision machining of ceramic matrix composites (CMCs), yet achieving micro-holes with low taper remains challenging due to non-uniform energy deposition. In this study, lateral lens ultrasonic vibration (LUV) assisted femtosecond laser drilling was proposed to improve hole quality. The effects of pulse energy (PE), laser frequency (LF), and pulse number per spot (NPs), together with LUV assistance, on the inlet diameter (Din), outlet diameter (Dout), and taper were systematically investigated using a Box–Behnken response surface design. The results indicate that increasing NPs and PE enlarges Din and Dout while reducing taper, whereas increasing LF produces the opposite effect. Statistical analysis shows that LF dominates the variation of Din and Dout, while NPs has the most significant influence on taper. The incorporation of LUV leads to an increase in Dout and a reduction in taper, which may be attributed to the improved laser energy distribution facilitated by LUV. Process optimization predicts an optimal set of parameters (PE = 500 µJ, LF = 20 kHz, NPs = 20) under LUV, yielding a taper of approximately 1.3°, which corresponds to a reduction of about 19% relative to the condition without LUV. The proposed LUV-assisted femtosecond laser machining strategy provides an effective approach for improving micro-hole quality in CMC materials.