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<p>Lithium niobate (LiNbO<sub>3</sub>) is widely used in acoustic devices for 5G communications due to its excellent piezoelectric properties. The fabrication of single-crystalline LiNbO<sub>3</sub> thin film with an all-dielectric Bragg reflector (LNDBR) can further enhance the quality factor of the device. Currently, common single-crystalline LiNbO<sub>3</sub> thin films fabricated by the crystal-ion-slicing (CIS) technique do not have Bragg reflector structure. However, the intrinsic stress induced by the deposition of the Bragg reflector is not negligible. Therefore, an effective stress modulation is significant for the fabrication of the high-quality LNDBR structure. In this work, the effects of the pre-annealing treatment on the stress modulation were investigated. A LiNbO<sub>3</sub> substrate with SiO<sub>2</sub>/Ta<sub>2</sub>O<sub>5</sub> Bragg reflector was fabricated. The substrates were pre-annealed at different temperatures to modulate the intrinsic stress. The results revealed that both structural warpage and intrinsic stress of the substrate decreased as the pre-annealing temperature increased from 250&#xa0;°C to 500&#xa0;°C. With the decrease of the structural warpage, hydrophilic bonding with higher bonding energy can be realized. Subsequently, a larger area of single-crystalline LiNbO<sub>3</sub> thin film was exfoliated and transferred onto the substrate. The fabricated LNDBR exhibited good piezoelectric performance. This work demonstrates that the pre-annealing treatment can effectively release the stress in the LiNbO<sub>3</sub> substrate with SiO<sub>2</sub>/Ta<sub>2</sub>O<sub>5</sub> Bragg reflector structure, and such modulation is important for the fabrication of LNDBR by CIS technique, which is vital for realizing high-performance acoustic devices.</p>

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Effects of pre-annealing treatment on the stress modulation for the fabrication of the single-crystalline LiNbO3 thin film with all-dielectric bragg reflector

  • 期刊论文

  • 发表日期：

    2026年3月6日

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  • Yuedong Wang,
  • Xinqiang Pan,
  • Yao Shuai,
  • Chen Wu,
  • Zijie Wei,
  • Peiran Li,
  • Hao Wu,
  • Huizhong Zeng,
  • Bin Peng,
  • Chuangui Wu,
  • Wanli Zhang

摘要

Lithium niobate (LiNbO3) is widely used in acoustic devices for 5G communications due to its excellent piezoelectric properties. The fabrication of single-crystalline LiNbO3 thin film with an all-dielectric Bragg reflector (LNDBR) can further enhance the quality factor of the device. Currently, common single-crystalline LiNbO3 thin films fabricated by the crystal-ion-slicing (CIS) technique do not have Bragg reflector structure. However, the intrinsic stress induced by the deposition of the Bragg reflector is not negligible. Therefore, an effective stress modulation is significant for the fabrication of the high-quality LNDBR structure. In this work, the effects of the pre-annealing treatment on the stress modulation were investigated. A LiNbO3 substrate with SiO2/Ta2O5 Bragg reflector was fabricated. The substrates were pre-annealed at different temperatures to modulate the intrinsic stress. The results revealed that both structural warpage and intrinsic stress of the substrate decreased as the pre-annealing temperature increased from 250 °C to 500 °C. With the decrease of the structural warpage, hydrophilic bonding with higher bonding energy can be realized. Subsequently, a larger area of single-crystalline LiNbO3 thin film was exfoliated and transferred onto the substrate. The fabricated LNDBR exhibited good piezoelectric performance. This work demonstrates that the pre-annealing treatment can effectively release the stress in the LiNbO3 substrate with SiO2/Ta2O5 Bragg reflector structure, and such modulation is important for the fabrication of LNDBR by CIS technique, which is vital for realizing high-performance acoustic devices.