Ameliorating the UV detection properties of ZnO thin films by optimizing the defects
摘要
In this study, zinc oxide (ZnO) thin films doped with tungsten trioxide (WO3) have been grown on glass substrates employing the Pulsed Laser Deposition (PLD) technique. The structural, morphological, optical, and electrical characteristics of the thin films have been examined at different substrate temperatures and doping concentrations of WO3. Films fabricated at higher substrate temperatures with low doping levels exhibit better crystallinity, as determined by X-ray diffraction (XRD) analysis. The surface morphological results of the SEM analysis are also consistent with the XRD results. The changes in the bandgap have been measured by photoluminescence (PL) spectra. The patterned aluminum contacts were deposited using a thermal evaporator to create the metal-semiconductor-metal (MSM) photodetectors. The current-voltage (I-V) curves and photo response for the thin films under dark and UV illumination have been measured in detail to investigate UV photodetection. The charge trapping and detrapping at the defect states of ZnO have also been investigated. The findings have demonstrated that a ZnO photodetector with optimal WO3 doping and deposited at an appropriate substrate temperature significantly reduces the response time and improves the responsivity and detectivity.