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<p>In large-scale aspheric machining of RB-SiC mirror, precision grinding was the necessary process for obtain machined surface finish. In order to further obtain the minimum grinding error accuracy, surface topography and plane accuracy of the precision grinding workpiece, a metal-bonded circular arc angle grinding wheel with an aspheric shape was generally used in the precision grinding process. However, the process to generate the grinding position and precision grinding path of the grinding wheel forms part of the circle arc by the understand and accurately control actual CNC precision paths through basic mathematical grinding models of radian differential and R sphere radian grinding wheel design. The O<sub>2</sub> surface modification process experiment, oxygen plasma surface modification and precision grinding (cylindrical grinding) were adopted to conduct alternating surface treatment on the surface of RB-SiC hard-brittle ceramic workpieces. The top layer is the carbon layer (C layer), followed immediately by the oxide layer (Si-C-O). In the paper, alloy electrode was used in turning of the desired aspheric grinding wheel and a design was conducted based on a new solution R sphere radian grinding wheel differential calculus. In order to further study and analysis the micro-structure of RB-SiC ceramic workpiece surface during precision grinding process of the copper fund molten grinding as optimized and simplified the precision grinding model. The small grinding wheel tilt angle creates. Under the same conditions of precision grinding process parameters, the surface optical properties, surface quality and finish-surface shape accuracy of RB-SiC ceramic workpieces are improved and enhanced.</p> Graphical Abstract <p></p>

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Investigation into the role of the RB-SiC ceramic TEM phase analysis and aspheric fabrication of complex process of the O2 plasma surface modification

  • 期刊论文

  • 发表日期：

    2026年2月25日

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  • Jiabin Xu,
  • Yunfei Sun,
  • Xiangyu Zhang,
  • Qiongyi He,
  • Yang Yu,
  • Chengshuai Sun,
  • Feihu Zhang

摘要

In large-scale aspheric machining of RB-SiC mirror, precision grinding was the necessary process for obtain machined surface finish. In order to further obtain the minimum grinding error accuracy, surface topography and plane accuracy of the precision grinding workpiece, a metal-bonded circular arc angle grinding wheel with an aspheric shape was generally used in the precision grinding process. However, the process to generate the grinding position and precision grinding path of the grinding wheel forms part of the circle arc by the understand and accurately control actual CNC precision paths through basic mathematical grinding models of radian differential and R sphere radian grinding wheel design. The O2 surface modification process experiment, oxygen plasma surface modification and precision grinding (cylindrical grinding) were adopted to conduct alternating surface treatment on the surface of RB-SiC hard-brittle ceramic workpieces. The top layer is the carbon layer (C layer), followed immediately by the oxide layer (Si-C-O). In the paper, alloy electrode was used in turning of the desired aspheric grinding wheel and a design was conducted based on a new solution R sphere radian grinding wheel differential calculus. In order to further study and analysis the micro-structure of RB-SiC ceramic workpiece surface during precision grinding process of the copper fund molten grinding as optimized and simplified the precision grinding model. The small grinding wheel tilt angle creates. Under the same conditions of precision grinding process parameters, the surface optical properties, surface quality and finish-surface shape accuracy of RB-SiC ceramic workpieces are improved and enhanced.

Graphical Abstract