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<p>This work examines the adjustment of the electron beam deflection angle in scanning electron microscopy (SEM) to improve the precision of microstructural characterisation, especially for sustainable energy materials. constructing and tested three magnetic objective lens designs (m1, m2, and m3) using finite element method simulations, magnetic flux density profiling, and beam-trajectory calculations. Model m1 stood out from the others because it had the smallest probe diameter, less spherical and chromatic aberration, and a longer working distance of 6.287&#xa0;mm. The best deflection angle was found to be between 0.1 and 0.2 mrad, and 0.15 mrad always gave the finest focus at all accelerating voltages. Model m3 had the maximum magnetic flux density, but its bigger aberration coefficients made the picture quality worse. These results make it clear how important balanced magnetic field distribution and lens shape are to SEM performance. The improved arrangement described here offers a more dependable imaging approach for nanostructured materials used in photovoltaics, batteries, and thin-film energy devices.</p>

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Optimizing electron beam deflection angle in scanning electron microscopy for enhanced material characterization in sustainable energy applications

  • 期刊论文

  • 发表日期：

    2025年12月16日

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  • Faiz Ahmad Mohammed,
  • Mushtaq Abed Al-Jubbori,
  • Khalaf Ajaj,
  • Radhwan M. Al-Ma’adheedy

摘要

This work examines the adjustment of the electron beam deflection angle in scanning electron microscopy (SEM) to improve the precision of microstructural characterisation, especially for sustainable energy materials. constructing and tested three magnetic objective lens designs (m1, m2, and m3) using finite element method simulations, magnetic flux density profiling, and beam-trajectory calculations. Model m1 stood out from the others because it had the smallest probe diameter, less spherical and chromatic aberration, and a longer working distance of 6.287 mm. The best deflection angle was found to be between 0.1 and 0.2 mrad, and 0.15 mrad always gave the finest focus at all accelerating voltages. Model m3 had the maximum magnetic flux density, but its bigger aberration coefficients made the picture quality worse. These results make it clear how important balanced magnetic field distribution and lens shape are to SEM performance. The improved arrangement described here offers a more dependable imaging approach for nanostructured materials used in photovoltaics, batteries, and thin-film energy devices.