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<p>In this work, we have synthesized TiO<sub>2</sub> nanograins (NGs) thin films of different thicknesses of 125&#xa0;nm, 300&#xa0;nm and 500&#xa0;nm on glass substrates using DC magnetron sputtering method under optimized conditions. The nitrogen dioxide (NO<sub>2</sub>) gas sensing properties can be enhanced by increasing the exposed surface area of active gas sensing element at nanoscale. Due to high surface to volume ratio, nanostructured TiO<sub>2</sub> thin film-based sensing elements revealed high surface area to react with analyte gas molecules. As a result, the surface reactivity is enhanced which caused to improve the gas sensing properties significantly. The NO<sub>2</sub> gas sensing performance along with the sensing mechanism of the developed TiO<sub>2</sub> NGs sensor were discussed in detail under low detection limit (2–50 ppm) at different operating temperatures (25–370&#xa0;°C). TiO<sub>2</sub> thin film of thickness 300&#xa0;nm exhibited excellent sensing properties and the sensor response of 21.5% and response/recovery time of (52&#xa0;s/84 s) were observed to 10 ppm NO<sub>2</sub> in dry synthetic air at 270&#xa0;°C. Moreover, the selectivity, stability, and reproducibility were also carried out for better device performance. Therefore, the nanostructured thin film based gas sensors paves a new approach to fabricate low cost and high performance gas sensor for detection of trace amount of NO<sub>2</sub> in the environment.&#xa0;</p> Graphical Abstract <p></p>

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Thickness dependent NO2 gas sensing properties of sputtered grown nanostructured TiO2 thin films

  • 期刊论文

  • 发表日期：

    2025年12月23日

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  • Sukriti Dahiya,
  • Nitish Yadav,
  • Hans Kumar Singh,
  • Swati Shandilya,
  • Vineet Verma,
  • Meenakshi Pilania,
  • Mantesh Kumari Yadav

摘要

In this work, we have synthesized TiO2 nanograins (NGs) thin films of different thicknesses of 125 nm, 300 nm and 500 nm on glass substrates using DC magnetron sputtering method under optimized conditions. The nitrogen dioxide (NO2) gas sensing properties can be enhanced by increasing the exposed surface area of active gas sensing element at nanoscale. Due to high surface to volume ratio, nanostructured TiO2 thin film-based sensing elements revealed high surface area to react with analyte gas molecules. As a result, the surface reactivity is enhanced which caused to improve the gas sensing properties significantly. The NO2 gas sensing performance along with the sensing mechanism of the developed TiO2 NGs sensor were discussed in detail under low detection limit (2–50 ppm) at different operating temperatures (25–370 °C). TiO2 thin film of thickness 300 nm exhibited excellent sensing properties and the sensor response of 21.5% and response/recovery time of (52 s/84 s) were observed to 10 ppm NO2 in dry synthetic air at 270 °C. Moreover, the selectivity, stability, and reproducibility were also carried out for better device performance. Therefore, the nanostructured thin film based gas sensors paves a new approach to fabricate low cost and high performance gas sensor for detection of trace amount of NO2 in the environment. 

Graphical Abstract