Tuning optical properties of diamond-like carbon films via post-thermal treatment
摘要
In recent years, many optical industries have shown interest in employing diamond-like carbon (DLC) coatings in their products. DLC layers were successfully deposited using a low frequency pulsed magnetron sputtering system on glass substrates at room temperature. Post-thermal treatments were performed on the coated substrates at various temperatures of 150 C, 200 C and 250 C. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) revealed significant structural changes in the DLC layers as a result of the thermal post-treatment process. Additionally, the morphology of the layers was analyzed using field emission scanning electron microscopy (FESEM). Furthermore, UV-visible spectroscopy was utilized to investigate the optical properties of the films. The optical parameters of the deposited DLC layers were subsequently calculated. The results demonstrated that the optical properties of the coated DLC films could be effectively tuned through post-thermal treatment at relatively low temperatures.