UV laser interaction with nanotips for Atom Probe Tomography applications
摘要
In characterization methods like Atom Probe Tomography (APT) and Atomic Force Microscopy (AFM), a comprehensive grasp of the thermal dynamics of nanotips under fast-pulsed laser irradiation is essential. This work presents a simulation study of laser interaction with nanotip specimens for applications in APT. Extensive analysis of the heating and cooling processes in silicon nanotips is conducted through the finite element method. The effects of different experimental conditions are incorporated in the model, including the specimen geometry, standing electric field, and cryogenic base temperature. Finite-difference time-domain (FDTD) simulations are used to calculate the light absorbed at different locations in the specimen, which is then used to determine heat input. It was observed that less than 5% of the total laser energy is absorbed by the silicon nanotip. Preferential heating of the illuminated side of the sample was observed for 200 ps for a laser pulse duration of 30 ps, beyond which the heat diffusion takes place predominantly towards the base of the specimen. It was determined that low pulse energies facilitate rapid attainment of temperature equilibrium across the hemispherical tip, thereby minimizing the likelihood of preferential evaporation. Another way to instantly obtain a uniform temperature distribution in APT is to employ a two-laser beam setup. For the first time a thermal analysis of a nanotip irradiated by two laser beams has been conducted. Such insights can be invaluable for researchers seeking to optimize parameters for new specimen types, ultimately reducing artifacts in probing and data analysis.