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<p>In this work, the effect of ammonia gas flow rate on the structural and morphological characteristics of silicon nitride nanopowders synthesized by the chemical reaction of silane and ammonia gases was studied. This reaction was induced and assisted by electric power transferred to the reaction volume throughout argon discharge at pressures of about 3 mbar. Results showed that increasing flow rate enhances nitridation, possibly boosting nucleation and phase purity, decreases the minimum particle size sharply from 55&#xa0;nm at 10 sccm to 22&#xa0;nm at 120 sccm, and improves nitrogen content and phase purity by promoting stoichiometric silicon nitride formation. Surface roughness of the prepared nanopowder prepared at 10 sccm flow rate was found highly appropriate for uses based on the surface interaction.</p>

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Effect of ammonia gas flow rate on structural and morphological characteristics of silicon nitride nanopowders synthesized by discharge-assisted silane-ammonia reaction

  • 期刊论文

  • 发表日期：

    2025年9月16日

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  • Abdullah M. Wali,
  • Mohammed Y. Khdiar

摘要

In this work, the effect of ammonia gas flow rate on the structural and morphological characteristics of silicon nitride nanopowders synthesized by the chemical reaction of silane and ammonia gases was studied. This reaction was induced and assisted by electric power transferred to the reaction volume throughout argon discharge at pressures of about 3 mbar. Results showed that increasing flow rate enhances nitridation, possibly boosting nucleation and phase purity, decreases the minimum particle size sharply from 55 nm at 10 sccm to 22 nm at 120 sccm, and improves nitrogen content and phase purity by promoting stoichiometric silicon nitride formation. Surface roughness of the prepared nanopowder prepared at 10 sccm flow rate was found highly appropriate for uses based on the surface interaction.