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<p>In this study, TiO₂ thin films were deposited on a Ti6Al-4&#xa0;V substrate using magnetron sputtering with varying deposition times and spin coating with different numbers of layers. The phase formation, microstructure, surface morphology, and thickness of the films were analyzed using X-ray diffraction, scanning electron microscopy atomic force microscopy, Fourier transform infrared spectroscopy, and Uv-visible spectroscopy. Mechanical properties and adhesion were assessed through nano-indentation and scratch tests. Tribological performance was evaluated through wear tests under lubrification in a physiological solution, and wear mechanisms were examined via SEM and 3D laser profilometer. The XRD analysis showed the presence of anatase phase for sputtered films and both rutile and anatase phases for spin-coated films. The TiO₂ film thickness increased with longer deposition times to achieve 470&#xa0;nm after 3h30mn, and more spin-coated layers to reaches 280&#xa0;nm after six layers. AFM results indicated increased roughness and larger grain sizes with higher deposition times and more layers. The films enhanced mechanical properties with varying adhesion characteristics and a single failure mode. The hardness and elastic modulus of the films increase with both deposition time and the number of layers. Thin Films deposited for 3h30mn, as well as those with 6 layers, exhibit high values of hardness equivalent to 104 and 92GPa, respectively. All films showed improved wear resistance and lower friction than uncoated samples, with a reduction of Coefficient of Friction (COF) of 29% for the 6-layer coating, witch demonstrate the lowest wear rate equivalent to 0.43.10<sup>− 4</sup> mm<sup>3</sup>/N/m, hence a reduction of 96%.</p>

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Mechanical properties and tribological performance of magnetron sputtering/spin coating TiO2 thin films in biological environments

  • 期刊论文

  • 发表日期：

    2025年6月13日

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  • Romayssa Derghoum,
  • Latifa Kahloul,
  • Soumaya Meddah,
  • Hacene Serrar,
  • Mounira Bourebia,
  • Amel Oulabbas,
  • Redha Aouati,
  • Abdennour Hebbaz,
  • Abdelghani kenzour

摘要

In this study, TiO₂ thin films were deposited on a Ti6Al-4 V substrate using magnetron sputtering with varying deposition times and spin coating with different numbers of layers. The phase formation, microstructure, surface morphology, and thickness of the films were analyzed using X-ray diffraction, scanning electron microscopy atomic force microscopy, Fourier transform infrared spectroscopy, and Uv-visible spectroscopy. Mechanical properties and adhesion were assessed through nano-indentation and scratch tests. Tribological performance was evaluated through wear tests under lubrification in a physiological solution, and wear mechanisms were examined via SEM and 3D laser profilometer. The XRD analysis showed the presence of anatase phase for sputtered films and both rutile and anatase phases for spin-coated films. The TiO₂ film thickness increased with longer deposition times to achieve 470 nm after 3h30mn, and more spin-coated layers to reaches 280 nm after six layers. AFM results indicated increased roughness and larger grain sizes with higher deposition times and more layers. The films enhanced mechanical properties with varying adhesion characteristics and a single failure mode. The hardness and elastic modulus of the films increase with both deposition time and the number of layers. Thin Films deposited for 3h30mn, as well as those with 6 layers, exhibit high values of hardness equivalent to 104 and 92GPa, respectively. All films showed improved wear resistance and lower friction than uncoated samples, with a reduction of Coefficient of Friction (COF) of 29% for the 6-layer coating, witch demonstrate the lowest wear rate equivalent to 0.43.10− 4 mm3/N/m, hence a reduction of 96%.