Scholarlink

<p>In this work, a thermal gas flow sensor based on Atomic Layer Thermopile (ALTP) thermoelectric sensitive film is presented. The sensor uses longitudinal heat conduction mode, consisting of La<sub>1 − x</sub>Ca<sub>x</sub>MnO<sub>3</sub> sensitive film, MgO insulating and thermal conductive film and Pt heat generating film, where the Pt heater is used to provide the heat source and La<sub>1 − x</sub>Ca<sub>x</sub>MnO<sub>3</sub> is used to provide the thermoelectric voltage output. The feasibility of the sensor is verified by COMSOL multi-physical finite element simulation, and the output characteristics of the sensor are studied. The ALTP thermal gas flow sensor has a response time of 0.32ms, indicating that the sensor has fast response capability. The sensor has a sensitivity of 0.205 mV/(L/min)/W. This work validates the application potential of fast response thermal flow sensor prepared based on Atomic Layer Thermopile.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

A fast-response thermal gas flow sensor based on Atomic Layer Thermopile thermoelectric sensitive film

  • 期刊论文

  • 发表日期：

    2025年6月4日

查看全文
  • Hongbo Tian,
  • Bowan Tao,
  • Xi Chen,
  • Kai Yang,
  • Ruipeng Zhao

摘要

In this work, a thermal gas flow sensor based on Atomic Layer Thermopile (ALTP) thermoelectric sensitive film is presented. The sensor uses longitudinal heat conduction mode, consisting of La1 − xCaxMnO3 sensitive film, MgO insulating and thermal conductive film and Pt heat generating film, where the Pt heater is used to provide the heat source and La1 − xCaxMnO3 is used to provide the thermoelectric voltage output. The feasibility of the sensor is verified by COMSOL multi-physical finite element simulation, and the output characteristics of the sensor are studied. The ALTP thermal gas flow sensor has a response time of 0.32ms, indicating that the sensor has fast response capability. The sensor has a sensitivity of 0.205 mV/(L/min)/W. This work validates the application potential of fast response thermal flow sensor prepared based on Atomic Layer Thermopile.