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<p>The tribological behavior and microscopic morphology of Cr<sub>2</sub>O<sub>3</sub>-TiO<sub>2</sub> thin films produced by magnetron sputtering are thoroughly examined in this work. A thorough analysis was conducted to determine how various Ar: O<sub>2</sub> flow ratios (80:20, 85:15, 90:10 and 95:5) affected the films microstructure, mechanical characteristics and tribological performance. Various characterization techniques, including scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and ball-on-disk wear testing, were employed to examine the microstructural features that contributed to the films’ mechanical durability. The results indicated a clear correlation between the gas flow ratio and tribological properties. Specifically, the thin films deposited at an Ar: O<sub>2</sub> ratio of 85:15 exhibited the best tribological performance, with a notably lower friction coefficient (0.41) and superior wear resistance (wear rate 4.3 × 10<sup>− 6</sup> mm³/N·m), making this ratio the optimal choice for achieving enhanced tribological behavior. The superior performance at this ratio is attributed to the formation of a denser and more refined microstructure, as observed in the cross-sectional and surface morphology analyses. These findings highlight the capability of magnetron sputtering to produce high-performance thin films through precise control of the Ar: O<sub>2</sub> flow ratio.</p>

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Influence of argon to oxygen flow ratio on tribological properties of Cr2O3-TiO2 films deposited by magnetron sputtering

  • 期刊论文

  • 发表日期：

    2025年1月24日

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  • Haijie Chen,
  • Bahdie Annisaa Prastika,
  • Zihao Zhang,
  • Chao Zhang

摘要

The tribological behavior and microscopic morphology of Cr2O3-TiO2 thin films produced by magnetron sputtering are thoroughly examined in this work. A thorough analysis was conducted to determine how various Ar: O2 flow ratios (80:20, 85:15, 90:10 and 95:5) affected the films microstructure, mechanical characteristics and tribological performance. Various characterization techniques, including scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and ball-on-disk wear testing, were employed to examine the microstructural features that contributed to the films’ mechanical durability. The results indicated a clear correlation between the gas flow ratio and tribological properties. Specifically, the thin films deposited at an Ar: O2 ratio of 85:15 exhibited the best tribological performance, with a notably lower friction coefficient (0.41) and superior wear resistance (wear rate 4.3 × 10− 6 mm³/N·m), making this ratio the optimal choice for achieving enhanced tribological behavior. The superior performance at this ratio is attributed to the formation of a denser and more refined microstructure, as observed in the cross-sectional and surface morphology analyses. These findings highlight the capability of magnetron sputtering to produce high-performance thin films through precise control of the Ar: O2 flow ratio.