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<p>Cranial microhole drainage surgery can not only effectively reduce intracranial pressure, but also decrease surgical trauma and shorten postoperative healing time. In this study, silicon nitride (Si₃N₄) ceramic, which possesses both favorable mechanical properties and biocompatibility, was selected as the material for micro-milling cutters. Based on the design criteria of micro-milling cutters, two straight-edged micro-milling cutters with three-flute and four-flute geometries were designed, both with a rake angle of 60°. The cranial bone milling process was simulated using ANSYS Workbench to investigate the milling performance of the two types of micro-milling cutters, and the structural strength of the cutters was also verified. The maximum stress at the tool tip was 5.27&#xa0;MPa, which is far lower than the fracture strength of Si₃N₄. To reduce the cost of parameter optimization, SRIM was used to analyze the sputtering yield, material damage, and energy loss during Ga ion beam sputtering of the Si₃N₄ target. Accordingly, acceleration voltages of 30 KeV and 5 KeV were selected as the roughing and finishing parameters for target processing, respectively. Finally, the micro-milling cutters were fabricated using a focused ion beam system. Rough machining of the tool face was performed at 30 KeV and 60 nA, while finishing of the cutting edge was carried out at 5 KeV and 12 nA. A micro-milling cutter with a cutting-edge size of 500&#xa0;nm was successfully fabricated.</p>

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FIB preparation of silicon nitride micro-milling cutter with nano-edge for minimally invasive cranial surgery

  • 期刊论文

  • 发表日期：

    2026年7月20日

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  • Shanfeng Xia,
  • Xuequan Li,
  • Yan Zhang,
  • Xintian Wang,
  • Xixiang Xu,
  • Zhaoqiang Chen

摘要

Cranial microhole drainage surgery can not only effectively reduce intracranial pressure, but also decrease surgical trauma and shorten postoperative healing time. In this study, silicon nitride (Si₃N₄) ceramic, which possesses both favorable mechanical properties and biocompatibility, was selected as the material for micro-milling cutters. Based on the design criteria of micro-milling cutters, two straight-edged micro-milling cutters with three-flute and four-flute geometries were designed, both with a rake angle of 60°. The cranial bone milling process was simulated using ANSYS Workbench to investigate the milling performance of the two types of micro-milling cutters, and the structural strength of the cutters was also verified. The maximum stress at the tool tip was 5.27 MPa, which is far lower than the fracture strength of Si₃N₄. To reduce the cost of parameter optimization, SRIM was used to analyze the sputtering yield, material damage, and energy loss during Ga ion beam sputtering of the Si₃N₄ target. Accordingly, acceleration voltages of 30 KeV and 5 KeV were selected as the roughing and finishing parameters for target processing, respectively. Finally, the micro-milling cutters were fabricated using a focused ion beam system. Rough machining of the tool face was performed at 30 KeV and 60 nA, while finishing of the cutting edge was carried out at 5 KeV and 12 nA. A micro-milling cutter with a cutting-edge size of 500 nm was successfully fabricated.